Very Large-Scale-Integration

The final step in the development process, starting in the 1980s and continuing on, was "Very Large-Scale Integration" (VLSI), with hundreds of thousands of transistors, and beyond (well past several million in the latest stages).

For the first time it became possible to fabricate a CPU on a single integrated circuit, to create a microprocessor. In 1986 the first one megabit RAM chips were introduced, which contained more than one million transistors. Microprocessor chips produced in 1994 contained more than three million transistors.

This step was largely made possible by the codification of "design rules" for the CMOS technology used in VLSI chips, which made production of working devices much more of a systematic endeavour. (See the 1980 landmark text by Carver Mead and Lynn Conway referenced below.)